Energy-Dispersive X-Ray Spectroscopy (EDX)

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Energy-dispersive X-ray spectroscopy (EDS or EDX) is used to analyze the elemental or chemical composition of a sample by exciting inner shell electrons and analyzing characteristic X-rays emitted from an outer shell electron filling the electron hole. It is similar to X-ray Fluorescence (XRF) spectroscopy in signal analysis, but allows for the analysis of microscopic and even nanoscopic samples. EDX testing typically requires destruction of a sample but produces significantly more accurate results than XRF analysis. EDX systems consist of the following components:

  • Excitation Source (Electron Beam or X-Ray Beam)
  • X-Ray Detector
  • Pulse Processor
  • Analysis Software

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